本文將敘述近年來廣受探討的奈米結構抗反射層及其在太陽能電池上的應用。氧化銦錫乃是目前市場上具有高穿透率及高導電率的透明電極之主要材料，利用斜向電子槍蒸鍍法，可於多種基板上製作出氧化銦錫奈米柱狀結構，其具有低成本、快速的優點，同時可大面積的生產。在砷化鎵太陽能電池的應用上，可提升23%的轉換效率。

An array of conductive indium-tin-oxide (ITO) nano-columns is deposited on GaAs solar cells using the glancing angle deposition (GLAD) method. Calculations based on a rigorous coupled-wave analysis method show that such ITO nano-columns offer superior angular and spectral anti-reflective (AR) properties. The optical characteristics of the ITO nano-columns are described. The conversion efficiency of GaAs solar cells with ITO nano-columns as the AR coating is increased by 23%.