熱電式微型發電器是利用標準 CMOS (complementary metal oxide semiconductor) 製程技術製作，由 CMOS 製程中的多晶矽層，透過摻雜形成 P 型和 N 型所組成的 370 組熱電偶串聯而構成，為了提高微發電器的 轉換性能，於熱電偶熱端上方設計高熱傳導係數的金屬鋁，並披覆上吸熱薄膜－奈米碳管，接收外部熱源 溫度，搭配反應性離子蝕刻 (RIE)，將熱電發電器底部的矽基材掏空，使結構懸浮，利用空氣的低熱傳導 率，防止熱量從熱電偶透過矽基材散失；冷端熱電偶則包覆於氧化矽層中，利用氧化矽層的低熱傳導率特 性隔絕熱源，使熱電偶兩端形成溫差，接著利用有限元素軟體 (ANSYS) 模擬微發電器接收熱能時，內部 所產生的溫度分布與溫度梯度變化。實驗結果顯示，於 400 K 的熱源溫度下，未披覆吸熱黑體薄膜－奈米 碳管的熱電發電器，產生的輸出電壓與輸出功率分別為 0.90 mV 與 1.72 pW；而披覆奈米碳管薄膜後，此 熱電發電器的輸出電與輸出功率分別提升至 1.56 mV 與 5.16 pW。此微型熱電發電器於披覆奈米碳管薄膜 後，電壓因子和功率因子分別為 0.23 mV/K/mm2 與 0.75 pW/K/mm2。

The thermoelectric microgenerators are manufactured using the standard complementary metal oxide semiconductor (CMOS) process. The microgenerators are composed of 370 thermocouples in series, and the thermocouples are formed by p-type and n-type polysilicon. The efficiency of the generators depends on the temperature difference between hot and cold parts of thermocouples. To enhance the generation efficiency, the reactive ion etching is employed to release the suspended structure of hot part, and the carbon nanotubes (CNTs) are coated on the hot part. The cold part of the thermocouples is covered by silicon oxide that provides low thermal conductivity and thermal isolation. ANSYS is adopted to simulate the temperature distribution and gradient of the generators. The experimental results showed that the thermoelectric generators without CNTs film had an output voltage of 0.90 mV and an output power of 1.72 pW at 400 K. The output voltage and output power of the generators with CNTs film were 1.56 mV and 5.16 pW at 400 K, respectively. The thermoelectric power generator with the MCNTs film had a voltage factor of 0.23 mV/K/mm2 and a power factor of 0.75 pW/K/mm2.