本文的重點為利用尋焦演算法以及可變焦透鏡，達成多重焦點影像融合的方法以及樣品表面輪廓模型的建立。大多攝影系統在光線聚焦處皆會有一景深值，若樣品在攝影系統景深內，則所拍攝的影像會是最清晰的，反之若樣品表面在景深外，則所拍攝的影像會是模糊的。尋焦演算法能夠計算影像的清晰度(sharpness)，演算法的輸出值，會隨著影像變得清晰而增加，因此利用尋焦演算法可判別樣品表面是否在景深內。本研究利用尋焦演算法可以判別影像清晰度的特性，配合可變焦透鏡達成多重焦點影像融合的功能，利用多重影像焦距融合演算法就算在景深不足的情況下，也能夠透過融合不同焦距下取得的影像合成品質良好的影像，並同時繪製出樣品的表面顯微形貌。本篇論文所研究之表面輪廓量測方法為被動式量測，因此不會直接與待測物進行物理性的接觸，避免掉損壞待測物的風險，適合應用在脆弱的樣品上。

The purpose of this thesis is about to integrate and develop a method of surface profi ling measurement that based on the image processing technique into varifocal microscope system. The method of measuring surface profi le based on the image processing technique is call shape from focus or multi-focus image fusion. It can measure the surface profi le of sample and create an image with large depth of fi eld at same time. If the surface of sample is out of depth of field, the image is blurry. Using focus algorithm can calculate the sharpness of image and help the varifocal microscope systems to determine the best focus setting. The multi-focus image fusion method is established based on focus algorithm and integrated into the varifocal microscope systems in this research. Even in the case of poorly depth of fi eld, our systems are capable to get the all in-focus image with the multi-focus image fusion method and this research can also achieve the functionality of surface profi ling in the microscopy scale. The surface profi ling method in this research is passive measurement, it does not cause any physically contact to the sample. It can prevent the risk of damaging the sample.