精度定位在工業應用扮演著一個相當重要的角色，當定位精度要求提高時，傳動機構的背隙、摩擦與磁滯等非線性特性往往會造成控制上的問題。因此，本論文提出整合音圈馬達與撓性解耦合的單軸線性致動器設計，消除高精度定位須面對的非線性問題。此外，本論文以dsPIC30F為控制器核心，結合線性放大器、類比數位轉換、電流感測與CAN收發電路等設計，架構出一智慧型驅動器，藉由網路即時控制降低多軸控制系統的複雜度。最後提出以主極點配置的PID控制器設計，藉由MATLAB/Simulink/Real-Time Windows Target驗證單軸線性致動器的位置控制性能。

Precision positioning plays a very important role in industry applications. When the positioning accuracy is highly demanded, the nonlinear characteristic of transmission mechanism, such as backlash, friction and hysteresis, will induce many difficult control issues. Therefore, this paper proposes one-dimensional linear actuator design by integrating voice coil motor and flexure mechanism, to eliminate the nonlinear problem in high precision positioning system. Based on dsPIC 16-bit signal processor, this paper also develops an intelligent linear motor drive, which integrates linear power amplifier, CANbus interface circuit, and current/voltage interface circuits. Using the technique of real-time network control, the proposed linear actuator can reduce the complexity of multi-axis motion application. Finally, a PID controller is designed using the pole-placement technique. The positioning control performance of the proposed integrated mechanism is effectively verified by experimental results through the application of MATLAB/Simulink/Real-Time Windows Target.