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篇名 應用於化學與生化檢測上之CMOS MEMS懸臂樑感測平臺
卷期 30:1=165
並列篇名 A Platform of CMOS MEMS Microcantilever for Chemical and Biochemical Detection
作者 關恕黃榮山
頁次 42-53
出刊日期 200808

中文摘要

過去幾年來利用懸臂樑作為換能機制的研究非常蓬勃,透過晶片表面之化學修飾與生物分子固定化技術,以及感測元件之微製造技術,由生物膜引入相容於CMOS製程的微懸臂樑,以建立一個可即時、免螢光、可定量檢測之生化感測器平台,有助於促進新藥物之研發、環境監控、生物技術方法之提升,以及新的治療診斷技術之開發。在本文中將針對國際數個團隊在此領域的優異成果進行介紹。由這些成果展現其廣泛之可應用性,相容於微電子技術之高度整合性,以及未來可望朝向無線感測網絡之發展性,因此建立一套彈性且高效能的整合設計環境,以便加速設計製作流程、降低研發成本和提高產品的可靠度是必要的。

英文摘要

Over the past few years, an increasingly number of studies have been conducted on using the microcantilevers as transducers in biochemical-sensing systems. With the bottom-up technology in chemical surface treatment and biomolecular functionality and the top-down microfabrication on physical devices, the biofilm-induced CMOS compatible microcantilever establishes a platform in real-time, label-free, and quantitative analysis which facilitates the discovery of new drugs, monitor of the environmental, biotechnological methods, and materials for therapeutics and diagnostics. In this article, we will introduce several important research groups in the field of Chemical and Biochemical Detection. In summary, the anomechanics-based microcantilever platform exhibits its broad applicability, effectiveness, high microelectronics integration, promising wireless sensor networks as well. Therefore, a flexible, efficient, and integrated design environment should be constructed for MEMS industry to speed up the design flow, reduce research cost and improve the product reliability.

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