CMOS整合式感測器具有體積微小化、感測能力提昇和內連線能力強的優點，由於MEMS的新興應用蓬勃發展，對於感測器的體積、性能和成本等各個面向的要求也趨於多元，本文探討可發揮整合CMOS技術優勢的常用感測機制，並介紹將感測器整合在積體電路上的各種製程方法，最後以熱絲式流量計、電容式加速度計與電容式麥克風為例說明整合之後的結果。

CMOS integrated sensors possess the advantages of size miniaturization, improved sensitivity and electrical routing capability. Since the emerging applications rising, the requirements for micro sensors are diverse in size, performance, cost and so on. This article discusses the common used sensing mechanisms benefited by the integration with CMOS technology. Various fabrication approaches are introduced to realize the CMOS integrated sensors. Finally, three existed examples including hot wire anemometer, capacitive accelerometer and condenser microphone are used to demonstrate the implementation of CMOS micro sensors.